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Amorphous Sm–Co films 1

In-plane uniaxial anisotropy 1

Sputtering 1

cluster 1

cluster beam deposition 1

cluster growth 1

heterogeneous catalysis 1

high-purity metal 1

integrated circuit 1

magnetron sputtering 1

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Scaling up of cluster beam deposition technology for catalysis application

Frontiers of Chemical Science and Engineering 2021, Volume 15, Issue 6,   Pages 1360-1379 doi: 10.1007/s11705-021-2101-7

Abstract: progress on three types of cluster source which have the most promising potential for scale-up, including sputteringWhile the sputtering gas aggregation source is leading ahead with a production rate of ~20 mg·h–

Keywords： nanoparticle     cluster     cluster beam deposition     magnetron sputtering     heterogeneous catalysis    

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Development of High-purity Metal Sputtering Targets for Integrated Circuits

He Jinjiang , Lyu Baoguo , Jia Qian , Ding Zhaochong , Liu Shuqin ,Luo Junfeng , Wang Xingquan

Strategic Study of CAE 2023, Volume 25, Issue 1,   Pages 79-87 doi: 10.15302/J-SSCAE-2023.01.003

Abstract:

High-purity metal sputtering target is one of the key basic materialsSelf-dependence of the sputtering targets is vital for the high-quality development of the integratedThis study analyzes the application demand for and development status of high-purity metal sputteringchallenges regarding the key manufacturing technologies and engineering application of high-performance sputteringinternational exchange and cooperation,thereby promoting the development quality and level of high-purity metal sputtering

Keywords： high-purity metal     sputtering target     integrated circuit     thin film     metallization    

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Molecular dynamics simulations of initial Pd and PdO nanocluster growth in a magnetron gas aggregation source

Pascal Brault, William Chamorro-Coral, Sotheara Chuon, Amaël Caillard, Jean-Marc Bauchire, Stève Baranton, Christophe Coutanceau, Erik Neyts

Frontiers of Chemical Science and Engineering 2019, Volume 13, Issue 2,   Pages 324-329 doi: 10.1007/s11705-019-1792-5

Abstract: Molecular dynamics simulations are carried out for describing growth of Pd and PdO nanoclusters using the ReaxFF force field. The resulting nanocluster structures are successfully compared to those of nanoclusters experimentally grown in a gas aggregation source. The PdO structure is quasi-crystalline as revealed by high resolution transmission microscope analysis for experimental PdO nanoclusters. The role of the nanocluster temperature in the molecular dynamics simulated growth is highlighted.

Keywords： molecular dynamics     cluster growth     plasma sputtering     nanocatalyst    

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Tunable In-Plane Anisotropy in Amorphous Sm–Co Films Grown on (011)- Oriented Single-Crystal Substrates Article

Wenhui Liang, Houbo Zhou, Jiefu Xiong, Fengxia Hu, Jia Li, Jian Zhang, Jing Wang, Jirong Sun, Baogen Shen

Engineering 2020, Volume 6, Issue 2,   Pages 158-163 doi: 10.1016/j.eng.2019.11.010

Abstract:

Amorphous Sm–Co films with uniaxial in-plane anisotropy have great potential for application in informationstorage media and spintronic materials. The most effective method to produce uniaxial in-plane anisotropy is to apply an in-plane magnetic field during deposition. However, this method inevitably requires more complex equipment. Here, we report a new way to produce uniaxial in-plane anisotropy by growing amorphous Sm–Co films onto (011)-cut single-crystal substrates in the absence of an external magnetic field. The tunable anisotropy constant, kA, is demonstrated with variation in the lattice parameter of the substrates. A kA value as high as about 3.3 × 104 J·m−3 was obtained in the amorphous Sm–Co film grown on a LaAlO3(011) substrate. Detailed analysis indicated that the preferential seeding and growth of ferromagnetic (FM) domains caused by the anisotropic strain of the substrates, along with the formed Sm–Co, Co–Co directional pair ordering, exert a substantial effect. This work provides a new way to obtain in-plane anisotropy in amorphous Sm–Co films.

Keywords： Amorphous Sm–Co films     In-plane uniaxial anisotropy     Sputtering    

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sub>xIn1−x)2O3 layer grown by magnetron sputtering Research Articles

Fabi Zhang, Jinyu Sun, Haiou Li, Juan Zhou, Rong Wang, Tangyou Sun, Tao Fu, Gongli Xiao, Qi Li, Xingpeng Liu, Xiuyun Zhang, Daoyou Guo, Xianghu Wang, Zujun Qin,zhangfabi@outlook.com,qinzj@guet.edu.cn

Frontiers of Information Technology & Electronic Engineering 2021, Volume 22, Issue 10,   Pages 1370-1378 doi: 10.1631/FITEE.2000330

Abstract: Multicomponent oxide (GaIn)O films are prepared on (0001) sapphire substrates to realize a tunable band-gap by technology followed by thermal annealing. The optical properties and band structure evolution over the whole range of compositions in ternary compounds (GaIn)O are investigated in detail. The X-ray diffraction spectra clearly indicate that (GaIn)O films with Ga content varying from 0.11 to 0.55 have both cubic and monoclinic structures, and that for films with Ga content higher than 0.74, only the monoclinic structure appears. The transmittance of all films is greater than 86% in the visible range with sharp absorption edges and clear fringes. In addition, a blue shift of ultraviolet absorption edges from 380 to 250 nm is noted with increasing Ga content, indicating increasing band-gap energy from 3.61 to 4.64 eV. The experimental results lay a foundation for the application of transparent conductive compound (GaIn)O thin films in photoelectric and photovoltaic industry, especially in display, light-emitting diode, and solar cell applications.

Keywords： (GaxIn1−x)2O3薄膜；带隙可调谐；磁控溅射    

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Title Author Date Type Operation

Scaling up of cluster beam deposition technology for catalysis application

Journal Article

Development of High-purity Metal Sputtering Targets for Integrated Circuits

He Jinjiang , Lyu Baoguo , Jia Qian , Ding Zhaochong , Liu Shuqin ,Luo Junfeng , Wang Xingquan

Journal Article

Molecular dynamics simulations of initial Pd and PdO nanocluster growth in a magnetron gas aggregation source

Pascal Brault, William Chamorro-Coral, Sotheara Chuon, Amaël Caillard, Jean-Marc Bauchire, Stève Baranton, Christophe Coutanceau, Erik Neyts

Journal Article

Tunable In-Plane Anisotropy in Amorphous Sm–Co Films Grown on (011)- Oriented Single-Crystal Substrates

Wenhui Liang, Houbo Zhou, Jiefu Xiong, Fengxia Hu, Jia Li, Jian Zhang, Jing Wang, Jirong Sun, Baogen Shen

Journal Article

sub>xIn1−x)2O3 layer grown by magnetron sputtering

Fabi Zhang, Jinyu Sun, Haiou Li, Juan Zhou, Rong Wang, Tangyou Sun, Tao Fu, Gongli Xiao, Qi Li, Xingpeng Liu, Xiuyun Zhang, Daoyou Guo, Xianghu Wang, Zujun Qin,zhangfabi@outlook.com,qinzj@guet.edu.cn

Journal Article